Thin Film Reflectometry System

View Product Models


Wavelength Range Optical Layer Thickness Repeatability Refractive Index Spot Size
NANOCALC-VIS 400-850 nm 50 nm – 100 µm 0.3 nm Yes 200 µm or 400 µm standard; 100 µm available upon request
NANOCALC-XR 250-1050 nm 10 nm – 100 µm 0.3 nm Yes 200 µm or 400 µm standard; 100 µm available upon request
NANOCALC-DUV 190-1100 nm 1 nm – 100 µm 0.3 nm No 400 µm standard; 200 µm available upon request
NANOCALC-NIR 900-1700 nm 100 nm – 250 µm 1.0 nm No 400 µm standard; 200 µm available upon request

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NanoCalc is a versatile and configurable thin film measurement system. It is based on spectroscopic reflectometry to accurately determine optical or non-optical thin film thickness. It is suitable for applications in a variety of semiconductor, medical and industrial applications. NanoCalc system measures anti-reflective coatings, anti-scratch coatings and rough layers on substrates such as steel, aluminum, brass, copper, ceramics and plastics.

The NanoCalc Thin Film Reflectometry System allows you to analyze the thickness of optical layers from 1 nm to 250 µm . You can observe a single thickness with a resolution of 0.1 nm and analyze single-layer or multilayer films in less than one second.


  • Reliable – resolution to 0.1 nm
  • Powerful – ability to analyze single- or multi-layers films
  • Portable – ideal for in situ, on-line thickness measurements
  • Sophisticated – algorithms for defect and roughness tolerance measurements

Engineering Specifications NanoCalc
Wavelength range: 190-1700 nm
Optical layer thickness: 1 nm – 250 µm
Repeatability: 0.3 nm – 1.0 nm
Optical resolution: 0.1 nm FWHM
Angle of incidence: 90°
Number of layers: Up to 10
Refractive index: Depends on the model
Test materials: Transparent or semi-transparent thin film materials
Reference needed: Yes (bare substrate)
Measurement modes: Reflection and Transmission
Rough materials capable: Yes
Measurement speed: 100 ms to 1 s
On-line capable: Yes
Height adjustment: With COL-UV-6.35 (10-50 mm)
Spot size: Depends on the model
Microspot: Yes (with microscope)
CCD color: Yes (with microscope)
Mapping option: 150 mm (6″) and 300 mm (12″) xy-scanning stages

Applications in which this product is used:

Measurement Techniques in which this product is used:

Getting Started with the NanoCalc Reflectometer

The SpecEl Ellipsometer System from Ocean Optics

NanoCalc Basics Features

NanoCalc User Interface Tutorial

NanoCalc Edit Layer Structure of Version 4.0

NanoCalc Fast Fourier Transfer Tutorial