VFT-Series Vacuum Feedthroughs

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Ocean Optics offers a full line of fiber vacuum feedthrough accessories for vacuum chamber applications such as semiconductor and thin film processing. These vacuum feedthroughs include general-purpose bolt-style feedthroughs with an O-ring, and feedthroughs mounted in conflat and ISO KF industrial-grade flanges. All have in-vacuum and in-air side male SMA 905 connectors for coupling to optical fibers (available separately).

O-ring bolt-style feedthroughs are designed to perform well in NEMA enclosures, glove boxes and moderate- to high-pressure applications, while conflat and ISO KF flanges are ideal for mounting to an existing vacuum chamber port.

  • Each feedthrough comes with two splice bushings, which are in-line adapters to mate SMA 905 connectors
  • O-ring feedthroughs can be screwed into a 3/8-24 external threaded hole in the vacuum chamber, or can be bolted into a smooth hole with the provided nut and washer
  • Metal-jacketed optical fiber assemblies are recommended for the low-pressure side of the chamber to minimize outgassing

Engineering Specifications O-ring Feedthroughs Conflat Feedthroughs ISO KF Feedthroughs
Construction: Novel metal-to-glass seal mounted in a bolt with recessed O-ring, provided with nut and washer Surgical-grade stainless steel fiber feedthrough welded into industry standard flange Surgical-grade stainless steel fiber feedthrough welded into industry standard flange
Vacuum rating: 10-10 Torr  10-10 Torr  10-10 Torr
Maximum temperature: 350 °C 300 °C 300 °C

Applications in which this product is used:

Measurement Techniques in which this product is used: